Double capacity sensor technology for feedback | ||
Travel range in horizontal directions up to: 200 µm, | ||
Travel range in vertical direction up to : 20 µm, | ||
Ultra high resolution: 0.1 nm | ||
Clear aperture diameter 45 mm | ||
Low cost | ||
Compact design and low weight | ||
Suitable for universal applications | ||
High stiffness | ||
Compensated creep effect | ||
Low frequency noise resistance | ||
Ideal capable for microscopic application | ||
Vacuum version available |
Every year Standa Company supplies for laboratories and linear motion market thousands of unique translation and rotation positioners for awide spectrum of positioning applications. Nanometer and Sub-nanometer resolution is impossible to reach with high-speed screw drives and linear motors, for this reason, we have prepared product line based on piezo elements.
Series 8NTS are perfectly suitable for smooth sub-nanometer translation of optical elements or probe in open and closed loop system.
Movable central part hangs on flexible springs and is driven with piezo actuators to ensure high stiffness and stability of the application. 8NTS design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.
Piezo scanning stage with central hole 8NTS-XYZ-200-A is equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect inherent for piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low-noise andhigh-speed displacement control.
To control 8NTS-XYZ-200-A piezo stage, universal controllers 8NSC-3000 or 8NSC-1000 are used as well as NSpec software.
Applications of 8NTS-XYZ-200-A include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.